Purushothaman Varadhan

2 years of experience

Competence Lead - Particle Control - ASML Netherlands
Defectivity and Particle Control - Multi-beam Electron Microscopy tools
Root cause analysis (RCA)

System Failure Mode and Effective Analysis (FMEA)
Machine learning and Data analysis
Tool qualifications and Supply quality

4 years of experience

Thin-film deposition for the surface protection and degradation protection;

In-depth materials characterization before and after plasma processing;

Industrial customers: Toyota-Europe, NWO institutes;

4 years of experience

Materials developments: Vacuum thin films deposition by Plasma-ALD,

Pulsed laser deposition (PLD), PECVD, CVD, and Sputtering.

Process developments: Photolithography, laser lithography, and e-beam

lithography; Dry (wet) chemical etching, Surface chemistry.

Computing: Statistics: Matlab, Origin pro, 3ds max and blender.

Reactive ion etching (RIE) of thin films by Ar plasma, Cl, and other chemistries;

Plasma enhanced CVD of SiO2 and SiN thin films and characterization;